Excellent optical quality and highly suitable for open loop control
For the most demanding applications, ALPAO high quality deformable mirror enable our customers to adjust the wavefront in your process at the sub-nm level.
Controlling the wavefront at the highest spatial resolution is then possible at every processing and test step of semiconductor fabrication.
With our custom deformable mirrors we can adjust the size, wavelength and spatial frequency to push forward the state of the art. Adaptive optics is becoming mandatory for the next generation of semiconductor equipment.